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higher fill SF6 solutions manual

higher fill SF6 solutions manual

Sep 04, 20128. Gunhead SF6 refill. Electron gunhead is filled with SF6. Due to natural leakage, SF6 gas needs to be refilled regularly. Originally, the interval was about every 2~3 months. However, recently, the interval decreased to 1~2 weeks. FEI engineers suspect degraded gasket, but no obvious solution.

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